This dry pump is a core vacuum equipment with high pumping speed, wide pressure range, and stable performance, and is widely used in the following key industries:
The most critical application field is used for wafer processing, chip etching, ion implantation, thin film deposition, semiconductor packaging, and vacuum cleaning of semiconductor equipment.
Applied to vacuum evaporation coating, magnetron sputtering coating, ion plating for hardware, glass, plastic, optical components, automotive parts, and decorative film coating.
Used for vacuum drying of pharmaceutical raw materials, vacuum distillation, crystallization, solvent recovery, freeze-drying (lyophilization) of biological products, and pharmaceutical production processes.
Suitable for vacuum distillation, molecular distillation, vacuum degassing, vacuum filtration, reaction kettle vacuum feeding/discharging, and volatile organic compound (VOC) recovery in chemical production.
Applied to vacuum packaging, vacuum dehydration, freeze-drying of food, vacuum concentration of fruit juice/syrup, and vacuum degassing of beverage products.
Used for vacuum smelting, vacuum brazing, vacuum heat treatment, vacuum sintering of metal parts, and degassing of non-ferrous metals.
Applied to waste gas vacuum collection, landfill gas extraction, sewage vacuum degassing,and VOCs waste gas treatment systems.
Critical for lithium battery production (electrode drying, electrolyte injection, cell formation), photovoltaic silicon wafer processing, hydrogen production by electrolysis of water, and fuel cell manufacturing.
Used for vacuum simulation test of aerospace components, vacuum leak detection of aircraft parts, satellite component processing, and vacuum thermal test of aerospace equipment.
Applied to vacuum casting, vacuum impregnation of castings, mold vacuum pumping, and vacuum adsorption in precision machining.
Suitable for vacuum processing of optical lenses, glass vacuum degassing, optical fiber manufacturing,and vacuum annealing of glass products.
High pumping speed in the medium and low vacuum range, strong anti-backflow ability, stable operation under harsh working conditions, and compatibility with other vacuum pumps to form a vacuum unit for ultra-high vacuum requirements.
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