BAOSI VACUUM water-cooling Oil lubricated Molecular Vacuum Pump
TECHNICAL PARAMETER
|
Model |
|
DFFY 400/4500PM |
|
|
Inlet flange |
- |
LF400 |
|
|
Outlet flange |
- |
KF40 |
|
|
Pumping speed |
L/s |
N2:4500 |
|
|
Compression ratio N2 |
- |
1×108 |
|
|
Ultimate pressure |
Pa |
5×10-6 |
|
|
Rotation speed |
rpm |
21000 |
|
|
Run-up time |
min |
<18 |
|
|
Oil |
ml |
200 |
|
|
Forevacuum pump speed |
L/s |
30 |
|
|
Cooling water temperature |
℃ |
≤25 |
|
|
Cooling water flow |
L/s |
1 |
|
|
Heater power |
W |
≤1200 |
|
|
Heater voltage |
V |
220 |
|
|
Installation direction |
- |
any |
|
|
Weight |
kg |
85 |
|
Outside Drawing :
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Pumping Cuver:
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Installation environment requirements:
1. The radial and axial magnetic field strength on the pump body surface must not exceed 3 mT (30 Gs).
2. The molecular pump is resistant to a radiation intensity of 105 rad.
3. Ambient temperature: 5-40℃
4. Relative humidity: ≤85%
5. Voltage: 220±22V, Frequency: 50±1Hz
6. Altitude: ≤3000m
Applications :
Oil-lubricated turbomolecular pumps are extensively used in these core industries:
➢ Semiconductor & Microelectronics
➢ Vacuum Coating (PVD/CVD)
➢ Scientific Research & Laboratory Analysis
➢ Vacuum Heat Treatment & Metallurgy
➢ Optoelectronics & Laser Manufacturing
➢ Lithium Battery & New Energy Material Processing
➢ Analytical Instrumentation
➢ Aerospace & Aviation Vacuum Testing