Water Cooling Turbomolecular High Vacuum Pump DFFZ250/2000PM-W 2000 L/S for Semiconductor

The DFFZ250/2000PM-W is a high-performance water-cooling turbomolecular vacuum pump engineered by BAOSI VACUUM for demanding industrial and scientific vacuum applications. Delivering 2000 L/s pumping speed with an ultimate pressure down to 6x10^-7 Pa (CF flange), this pump combines grease-lubricated bearing technology with efficient water cooling for reliable long-term operation across semiconductor, coating, and research environments.

• Grease-Lubricated Bearings — Extended service intervals and simplified maintenance compared to oil-circulation systems, reducing total cost of ownership
• Efficient Water Cooling — Maintains stable operating temperature even under high gas load conditions, ensuring consistent vacuum performance during prolonged runs
• Flexible Any-Angle Installation — Mounts in horizontal, vertical, or inverted orientation without performance loss, adapting to tight equipment layouts
• Rapid Run-Up Under 7 Minutes — Reaches full 24000 rpm operating speed quickly, minimizing system downtime between process cycles
• Low Vibration Below 0.15 μm — Critical for sensitive applications such as electron microscopy, mass spectrometry, and precision coating where mechanical stability is essential

ISO 9001 ISO 14001 OHSAS 18001

Oil-lubricated turbomolecular pumps are widely applied in multiple industrial fields with their excellent vacuum performance, stable operation, and cost-effective characteristics. Their main application industries are as follows:

• Semiconductor & Microelectronics
• Vacuum Coating (PVD/CVD)
• Scientific Research & Laboratory Analysis
• Vacuum Heat Treatment & Metallurgy
• Optoelectronics & Laser Manufacturing
• Lithium Battery & New Energy Material Processing
• Analytical Instrumentation