DFFY400 High Performance Water Cooled Turbomolecular Vacuum Pump 4500 L/s
DFFY400 is a high performance water cooled turbomolecular vacuum pump delivering 4500 L/s pumping speed. Grease lubricated design with efficient water cooling system for reliable continuous operation in semiconductor manufacturing, thin-film deposition, and high vacuum research applications.
Technical Data
| Model | DFFY400/4500PM-W |
| Pumping Speed (N₂) | 4500 L/s |
| Ultimate Pressure | ≤10-6 Pa |
| Cooling Method | Water Cooling |
| Lubrication | Grease |
| Inlet Flange | ISO-F 400 |
| Nominal Rotation Speed | 18000 rpm |
| Backing Pump Required | 9-30 L/s |
Application
Semiconductor manufacturing
Thin-film deposition coating
High vacuum research laboratories
Particle accelerator systems