GSC800B(D) 800 m³/h Dry Screw Vacuum Pump Industrial Grade for Semiconductor Manufacturing
Oil free dry screw vacuum pump 800m³/h with high ultimate pressure and stable running.
Technical Parameters
| Pumping speed (without purging) | 800 m³/h |
| Ultimate pressure (without purging) | ≤0.5 Pa |
| Motor power | 22 kW |
| Voltage(3ph) | 380~400 V |
| Inlet | ISO100 |
| Outlet | KF50 |
| Cooling water flow | ≥7 L/min |
| Purging flow | 50~90 L/min |
| Oil capacity | 1.7 L |
| Noise | ≤72 dB(A) |
| Weight | ~600/~700 kg |
Applications