GDQ-J16B DN16 High Vacuum Pneumatic Baffle Angle Valve for Semiconductor Equipment
DN16 high vacuum pneumatic baffle angle valve with magnetic switch position indication.
Technical Parameters
| Dn | 16 mm |
| Pressure range | 1*10⁻³~5*10⁴ Pa |
| Opening pressure differential | ≤1.2*10² Pa |
| Leak tightness | ≤1.3*10⁻⁷ Pa·L/s |
| Conductance | 4.5 L/s |
| Temperature | ≤120 ℃ |
| Power supply | AC220V 50Hz 6W or DC24V 3W |
| Air source | 0.4~0.7 MPa |
| Closing/opening time | ≤0.7 s |
Applications