GSD180D 180 m³/h Oil Free Dry Screw Vacuum Pump Industrial Grade for Semiconductor Manufacturing
Oil free dry screw vacuum pump 180m³/h with intelligent control and long service life.
Technical Parameters
| Pumping speed (without purging) | 180 m³/h |
| Ultimate pressure (without purging) | ≤0.5 Pa |
| Motor power | 5.5 kW |
| Voltage(3ph) | 380~400 V |
| Inlet | KF50 |
| Outlet | KF40 |
| Cooling water flow | ≥4 L/min |
| N2 purging flow | 12~50 L/min |
| Oil capacity | 0.6 L |
| Noise | ≤70 dB(A) |
| Weight | ~325 kg |
Applications