GRH1202 Dry Claw Vacuum Pump 1200 m³/h Oil-Free Industrial Vacuum Pump for Semiconductor CVD Process

GRH1202 Dry Claw Vacuum Pump — 1200 m³/h Oil-Free Industrial Solution

The GRH1202 is a high-performance dry claw vacuum pump from the GRH series, designed for demanding semiconductor, photovoltaic, and lithium battery manufacturing processes. With a pumping speed of 1200 m³/h and ultimate pressure of ≤0.5 Pa, it delivers reliable oil-free vacuum without contamination risk.

Key Features

• Oil-Free Claw Mechanism: Pump chamber contains no oil or working medium, ensuring clean vacuum suitable for sensitive processes
• Permanent Magnet Synchronous Motor: Delivers lower energy consumption compared to conventional motors
• Advanced Rotor Design: Enhanced dust particle handling capability for harsh process environments
• Dust & Vapor Tolerant: Insensitive to dust and water vapor in pumped gases
• Compact Footprint: Space-saving design with high system integration (821 * 420 * 791 mm)
• Comprehensive Protection: Full protection functions with strong self-adaptive capability
• Low Vibration & Noise: ≤70 dB(A) during operation at ultimate pressure
• Advanced Sealing: Lip seal and labyrinth seal system combined with nitrogen purge prevents oil contamination
• Remote Control: I/O interface and RS485 (Modbus protocol) for remote monitoring and control

Technical Specifications

Applications

• Semiconductor: Etch, Ion Implantation, CVD, ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD
• Photovoltaic: Crystal growth furnaces, solar cell manufacturing
• Lithium Battery: Cell vacuum drying, electrolyte filling, degassing