GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity Vacuum Pump for Semiconductor Process

GRM602 Multi-Stage Roots Dry Vacuum Pump — 600 m³/h Medium-Capacity Solution

The GRM601 is a medium-capacity multi-stage roots dry vacuum pump delivering 600 m³/h pumping speed with an impressive ultimate pressure of ≤0.15 Pa. Its dual 1.9+1.9 kW permanent magnet synchronous motors provide reliable oil-free vacuum for semiconductor, photovoltaic, and lithium battery applications.

Key Features

• Multi-Stage Roots Design: High pumping speed with low power consumption
• Dual Motor Configuration: 1.9+1.9 kW for balanced, efficient operation
• Ultra-Low Ultimate Pressure: ≤0.15 Pa for demanding process requirements
• Ultra-Quiet: ≤63 dB(A) — ideal for cleanroom environments
• Oil-Free Mechanism: Zero oil contamination for sensitive processes
• Superior Particle Handling: Advanced rotor structure for dusty processes
• Compact Integration: 865 * 344 * 751 mm, 260 kg
• Dust & Vapor Insensitive: Reliable with process byproducts and moisture
• Advanced Sealing: Lip seal + labyrinth + nitrogen purge protection
• Remote Intelligence: I/O and RS485 (Modbus) for factory automation

Technical Specifications

Applications

• Semiconductor: PECVD, MOCVD, SACVD, RTP, HDP-CVD, ALD, Metal Etch, Silicon Etch
• Photovoltaic: Crystal growth, solar cell manufacturing
• Lithium Battery: Cell drying, electrolyte filling, degassing
• Flat Panel Display: LED and LCD manufacturing processes