GRM201 Multi-Stage Roots Dry Vacuum Pump 200 m³/h Oil-Free Compact Vacuum Pump for Semiconductor Clean Process

GRM201 Multi-Stage Roots Dry Vacuum Pump — 200 m³/h Compact Oil-Free Solution

The GRM201 is a compact multi-stage roots dry vacuum pump delivering 200 m³/h pumping speed with an ultra-quiet operation at ≤63 dB(A). Its oil-free multi-stage roots design makes it ideal for clean and medium semiconductor processes, photovoltaic manufacturing, and lithium battery production lines that require contamination-free vacuum with minimal footprint.

Key Features

• Multi-Stage Roots Design: Low power consumption with high pumping efficiency
• Ultra-Quiet Operation: ≤63 dB(A) — the quietest in its class
• Oil-Free Mechanism: Pump chamber contains absolutely no oil for clean process compatibility
• Permanent Magnet Synchronous Motor: 1.9 kW with superior energy efficiency
• Superior Dust Handling: Advanced rotor structure for enhanced particle exhaust
• Compact Footprint: Only 741 * 344 * 466 mm, 150 kg — easy to integrate
• Dust & Vapor Tolerant: Insensitive to process byproducts and moisture
• Full Protection: Comprehensive safety features with adaptive capability
• Smart Control: I/O and RS485 (Modbus protocol) for remote monitoring
• Triple Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum

Technical Specifications

Applications

• Semiconductor Clean/Medium Processes: ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD
• Photovoltaic: Crystal growth furnaces, solar cell fabrication
• Lithium Battery: Cell vacuum drying, electrolyte filling, degassing
• R&D Laboratories: University and industrial research vacuum systems