GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process

GRH6002 Dry Claw Vacuum Pump — 6000 m³/h Ultra-High-Capacity Solution

The GRH6001 is the flagship model of the GRH series, delivering an impressive 6000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Featuring an ISO250 inlet, 11+7.5 kW dual motor configuration, and robust 846 kg industrial construction, it is engineered for the most demanding large-scale semiconductor, photovoltaic, and lithium battery manufacturing facilities.

Key Features

• Ultra-High Capacity: 6000 m³/h pumping speed — the most powerful GRH series model
• Oil-Free Claw Technology: No oil contamination risk for sensitive semiconductor processes
• Dual Motor System: 11+7.5 kW permanent magnet synchronous motors
• ISO250 Large Inlet: Handles high-volume gas flow for large-scale production lines
• Superior Dust Handling: Advanced claw rotor design for harsh environments
• Industrial-Grade Build: 846 kg robust construction with 1076*516*988 mm footprint
• Low Noise: ≤70 dB(A) despite high pumping capacity
• Advanced Sealing: Triple-layer protection: lip seal + labyrinth + nitrogen purge
• Remote Intelligence: I/O + RS485 (Modbus) for full factory integration

Technical Specifications

Applications

• Large-Scale Semiconductor: High-volume etch, ion implantation, CVD processes
• Photovoltaic Mega-Factories: Crystal growth and cell manufacturing at scale
• Lithium Battery Gigafactories: Cell drying, electrolyte filling, degassing
• Flat Panel Display Manufacturing: LCD, LED, OLED production lines