GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer

The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.

• Ultra-High Capacity: 4200 m³/h for rapid Load-Lock pump-down cycles
• Multi-Stage Roots + Booster: High vacuum with wide working pressure range
• Powerful Dual Motor: 13+10 kW permanent magnet synchronous motors
• Unique Rotor Design: Optimized for low energy consumption with high efficiency
• Oil-Free Clean Vacuum: No oil contamination — ideal for semiconductor and solar
• Precision Manufacturing: Advanced CNC-machined rotors with full interchangeability
• Dual-End Bearing Support: Ultra-reliable rotor support with minimal vibration
• Superior Start-Up Reliability: Engineered for demanding process cycling
• Advanced Sealing: Lip seal + labyrinth oil barrier + nitrogen purge — truly oil-free
• Water-Cooled Sealed Motor: Eliminates oil leak risk, extends service life
• Intelligent Control: One-touch start/stop with I/O and RS485 (Modbus-RTU)

• Semiconductor Manufacturing: Load-Lock chambers, transfer modules, process interfaces
• Heterojunction (HJT) Solar Cell: PECVD vacuum, rapid pump-down
• Lithium Battery Gigafactories: High-volume cell drying and vacuum processing
• Vacuum Coating: Load-Lock for substrate transfer while maintaining chamber vacuum