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GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

Name: GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
Brand: Ningbo Baosi Energy Equipment Co., Ltd.
SKU: GRH3001
Price: 15,650.00 USD
Availability: InStock

Product Details:

Place of Origin:	China
Brand Name:	Baosi
Certification:	CE
Model Number:	GRH3001

Detail Information

Place of Origin:

China

Brand Name:

Baosi

Certification:

Model Number:

GRH3001

Pumping Speed:

3000 M³/h

Ultimate Pressure:

≤0.5 Pa

Motor Power:

11+7.5 KW

Voltage:

380V/3-Phase

Inlet:

ISO160

Outlet:

KF40

Noise:

≤70 DB(A)

Weight:

770 Kg

Dimensions:

922×516×988 Mm

Cooling Water:

0.1-0.6 MPa, 11 L/min

N2 Purge:

0.2-0.6 MPa, 43/97/123 L/min

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Trading Information

Minimum Order Quantity:

1 Set

Price:

USD 12800-18500/Set

Packaging Details:

Export Standard Wooden Case Packaging

Delivery Time:

20-35 Working Days

Payment Terms:

T/T,L/C

Supply Ability:

30 Sets/Month

Product Description

GRH3001 Dry Claw Vacuum Pump 3000 m³/h High-Capacity Oil-Free Vacuum Pump for Semiconductor Industrial Process

GRH3001 Dry Claw Vacuum Pump — 3000 m³/h High-Capacity Oil-Free Solution

The GRH3001 is a high-capacity dry claw vacuum pump delivering 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. With a powerful 11+7.5 kW dual motor configuration, it handles the most demanding semiconductor, photovoltaic, and lithium battery manufacturing processes while maintaining contamination-free operation.

Key Features

High-Capacity Oil-Free Design: 3000 m³/h pumping speed with zero oil contamination risk
Dual Motor System: 11+7.5 kW permanent magnet synchronous motors for maximum efficiency
Advanced Claw Rotor: Superior dust handling and long service life in harsh environments
Dust & Vapor Tolerant: Insensitive to particulates and water vapor in process gases
Compact Integration: 922 * 516 * 988 mm footprint with 770 kg robust construction
Comprehensive Protection: Full safety and monitoring features with adaptive control
Low Noise Operation: ≤70 dB(A) for comfortable working environments
Multi-Layer Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
Smart Connectivity: I/O and RS485 (Modbus protocol) remote monitoring and control

Technical Specifications

Model	GRH3001
Pumping Speed	3000 m³/h
Ultimate Pressure	≤0.5 Pa
Motor Power	11 + 7.5 kW
Voltage	380V (3-Phase)
Inlet Connection	ISO160
Outlet Connection	KF40
Noise Level	≤70 dB(A)
Weight	770 kg
Dimensions (LWH)	922 * 516 * 988 mm
Cooling Water Pressure	0.1–0.6 MPa
Cooling Water Flow	11 L/min
N₂ Purge Pressure	0.2–0.6 MPa
N₂ Purge Flow	43/97/123 L/min
Operating Temperature	5–40°C; ≤90% RH

Applications

Semiconductor: Etch, Ion Implantation, CVD (ALD, LPCVD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
Photovoltaic: Crystal growth, solar cell manufacturing processes
Lithium Battery: Cell vacuum drying, electrolyte filling, degassing processes

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GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

High Light

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